FAST launch new MODular Slurry Blending & Delivery Systems

Published Fri 26th Feb 2010

The FAST MODular CMP Slurry Delivery System has been primarily designed for the distribution and precision blending of various CMP slurries. The system is designed to meet the requirements of the most difficult and challenging CMP applications. The FAST CBU and CBU+ Blending and Distribution module can blend CMP slurry, oxidizers and surfactants with DI Water to the highest degree of accuracy. This can be achieved by pumping slurry or chemical from any of the various modular FAST Chemical Distribution Unit (CDU) options. With onboard precision controls, the end user has the flexibility of determining their own batch sizes for the CMP application at hand. The systems incorporate the latest state of the art Levitronix pumping technology. The FAST CBU and CBU+ uses closed loop maglev pumping systems for the delivery of the blended slurry, maintaining consistent pressure and flow across numerous toolsets. This low shear force pump technology coupled with in-line filtration system minimises slurry particulate agglomeration thus reducing micro scratching, and improving process yield, while the various onboard metrology options ensure blend accuracy and quality from batch to batch.