CMP MODular Slurry Delivery

Overview

The FAST MODular CMP Slurry Delivery System has been primarily designed for the distribution and precision blending of various CMP slurries. The system is designed to meet the requirements of the most difficult and challenging CMP applications. The FAST CBU and CBU+ Blending and Distribution module can blend CMP slurry, oxidizers and surfactants with DI Water to the highest degree of accuracy. This can be achieved by pumping slurry or chemical from any of the various modular FAST Chemical Distribution Unit (CDU) options. With onboard precision controls, the end user has the flexibility of determining their own batch sizes for the CMP application at hand.

The systems incorporate the latest state of the art Levitronix pumping technology. The FAST CBU and CBU+ uses closed loop maglev pumping systems for the delivery of the blended slurry, maintaining consistent pressure and flow across numerous toolsets. This low shear force pump technology coupled with in-line filtration system minimises slurry particulate agglomeration thus reducing micro scratching, and improving process yield, while the various onboard metrology options ensure blend accuracy and quality from batch to batch.

Features

The FAST MODular systems can offer value for money solutions for almost any medium to high volume CMP application

• The CBU+ overcomes chemical out gassing issues often seen with various oxidizers
• Monitored pale, drum or tote weighing with automatic supply transition

     o    To maximise uptime

• Drum and tote agitation with pump tank mixing

     o    In drum mixing hardware coupled with Levitronix configurable Pump Tank Mixer units ensure optimal slurry blend quality, reducing process drift

• Process tank weighing systems

     o    To allow the control of small batch sizes

• Automatic rinsing programs for tanks and slurry lines

     o    To prevent slurry residue and agglomeration causing tool downtime and scratching

• Nitrogen purging for slurry tanks

     o    To eliminate crystallization and the build up of slurry residue

• State of the art metrology for precision blending accuracy

     o    PH, density and concentration allows the user to control batches to critical accuracy levels

• Colour LCD GUI for user friendly integration

      o    Allows the user manually manipulate process screen, change timers and start sequence

• MODular cabinets can be located in any configuration to utilise available space efficiently
• Inter transfer of blended slurry between process tanks 
• One Control Unit manages up to two CBU or CBU+ units and four CDU units
• Liquid containment as standard