Wet Processing
Space Saving Semi-Auto Narrow Wet Bench: Advancer Micro
Overview
The Advancer Micro Semi-Auto Wet Bench is a popular space efficient alternative . The Advancer Micro provides tremendous processing capacity within an extremely small footprint for a relatively low cost by incorporating:
- Two Foot, (60cm) wide- small footprint for Single Process Step applications
- Single process and Rinse Tanks
- 2 Axis Front to Back Robot Design
- Minimal Exhaust Required, Configurable for Semi S2
- Shared facilities
- Shared electronics
- Single control PC driven I/O system
Fewer facility connections aids in the speed, ease and overall expense of installation. Shared module designs also provide for lower exhaust requirements. Advancer Micro Wet Bench offers all the same features and capabilities of the original Advancer Wet Bench, but in an even more compact design. The Advancer Micro Wet Bench can also be better configured for sequential process steps within a single module.
- Applications Include:
- HF or BOE Etch
- SC1 Megasonic
- SC2
- Resist Strip
- Texture Etch
Features
- Flexible and Upgradeable
- Easy to Use and Well Controlled
- Tailored
- Production Ready
- Designed for Safety
- Maintenance Friendly
- Reliable
- Supported